| 000 | 00412nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 241226s9999 xx 000 0 und d | ||
| 020 | _a978-0-15-569327-2 | ||
| 082 |
_a620.5 _bTAN |
||
| 100 | _aTaniguchi, N | ||
| 245 | 0 | _aNanotechnology integrated processing systems for ultra | |
| 260 |
_aNew Delhi : _bOxford Press, _c2008. |
||
| 300 | _a406 | ||
| 365 | _a595 | ||
| 650 | _aMechanical Mechatronics Engineering | ||
| 999 |
_c99004 _d99004 |
||