000 00407nam a2200145Ia 4500
008 241226s9999 xx 000 0 und d
020 _a9812-53-068-1
082 _a621.395
_bGHA
100 _aGhandhi, S
245 0 _aVlsi fabrication principles silicon and gallium arsenide
260 _aNew Delhi :
_bWiley Pub,
_c1994.
300 _a0
365 _a345
650 _aElectrical Electronics Communication,
999 _c97601
_d97601