| 000 | 00380nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 241226s9999 xx 000 0 und d | ||
| 020 | _a0 | ||
| 082 |
_a004.16 _bMAD |
||
| 100 | _aMadou, Marco | ||
| 245 | 0 | _aFundamentals of microfabrication | |
| 260 |
_aNew Delhi : _bCrs Press, _c2011. |
||
| 300 | _a723 | ||
| 365 | _a1495 | ||
| 650 | _aComputer EngineeringInformation Technology | ||
| 999 |
_c97440 _d97440 |
||