| 000 | 00378nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 241225s9999 xx 000 0 und d | ||
| 020 | _a0 | ||
| 082 |
_a621.381 _bRAI |
||
| 100 | _aRai, Chaudhery. | ||
| 245 | 0 | _aMems and moems technology and applications | |
| 260 |
_aNew Delhi : _bPrentice Hall Of India, _c1994 |
||
| 300 | _a520. | ||
| 365 | _a525 | ||
| 650 | _aApplied physics | ||
| 999 |
_c34742 _d34742 |
||