| 000 | 00437nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 241225s9999 xx 000 0 und d | ||
| 020 | _a0195681444 | ||
| 082 |
_a621.38152 _bCAM |
||
| 100 | _aCampbell , Stephen. | ||
| 245 | 0 | _aScience and engineering of microelectronic febrication | |
| 250 | _a2nd edition. | ||
| 260 |
_aNew Delhi : _bOxford University Press, _c1994 |
||
| 300 | _a603. | ||
| 365 | _a335 | ||
| 650 | _aApplied physics | ||
| 999 |
_c32515 _d32515 |
||