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| 008 | 241226s9999 xx 000 0 und d | ||
| 020 | _a0-07-120476-8 | ||
| 082 |
_a621.381 _bHSU |
||
| 100 | _aHsu, T | ||
| 245 | 0 | _aMems & microsystems design and manufacture | |
| 260 |
_aNew Delhi : _bMcgraw-Hill Publication, _c2002. |
||
| 300 | _axii,436 | ||
| 365 | _a295 | ||
| 650 | _aElectrical Electronics Communication, | ||
| 999 |
_c135619 _d135619 |
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