| 000 | 00417nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 241226s9999 xx 000 0 und d | ||
| 020 | _a0-19-510508-7 | ||
| 082 |
_a621.381 52 _bCAM |
||
| 100 | _aCampbell, S | ||
| 245 | 4 | _aThe science and engineeing microelectronic fabrication | |
| 260 |
_aNew Delhi : _bOxford Uni, _c1996. |
||
| 300 | _axv,536 | ||
| 365 | _a295 | ||
| 650 | _aElectrical Electronics Communication, | ||
| 999 |
_c134711 _d134711 |
||