| 000 | 00404nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 241226s9999 xx 000 0 und d | ||
| 020 | _a978-0-07-048709-3 | ||
| 082 |
_a621.381 _bHSU |
||
| 100 | _aHsu, T | ||
| 245 | 0 | _aMems & microsystems design and manufacture | |
| 260 |
_aNew Delhi : _bMacgraw-Hill Pub, _c2015. |
||
| 300 | _a436 | ||
| 365 | _a815 | ||
| 650 | _aElectrical Electronics Communication, | ||
| 999 |
_c108166 _d108166 |
||