| 000 | 00446nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 241226s9999 xx 000 0 und d | ||
| 020 | _a978-0-19-569327-0 | ||
| 082 |
_a620.5 _bTAN |
||
| 100 | _aTaniguchi, N | ||
| 245 | 0 | _aNanotechnology integrated processing systems for ultra precision and ultra fine products | |
| 260 |
_aNew Delhi : _bOxford Pub, _c2008. |
||
| 300 | _a406 | ||
| 365 | _a595 | ||
| 650 | _aMechanical Mechatronics Engineering | ||
| 999 |
_c102057 _d102057 |
||