| 000 | 00415nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 241226s9999 xx 000 0 und d | ||
| 020 | _a0-8493-9137-7 | ||
| 082 |
_a621.381 _bHAK |
||
| 100 | _aHak, Mahamed Gad-El | ||
| 245 | 4 | _aThe mems handbook mems:introduction and fundamentals | |
| 260 |
_aNew Delhi : _bCrc Press, _c2006. |
||
| 300 | _a400 | ||
| 365 | _a5096 | ||
| 650 | _aMechanical Mechatronics Engineering | ||
| 999 |
_c101844 _d101844 |
||