Taniguchi, N <br/><br/>
Nanotechnology integrated processing systems for ultra 

 - New Delhi  :  Oxford Press,  2008. 
 - 406 
<br/><br/><label>ISBN: </label>978-0-15-569327-2 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechanical Mechatronics Engineering
<br/><br/><label>Dewey Class. No.: </label>620.5  / TAN