Campbell Stephen A. <br/><br/>
Science and engineering of microelectronic fabrication 

 - Delhi :  Oxford Uni Press,  1994 
 - 603. 
<br/><br/><label>ISBN: </label>0195681444  
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRONICS AND COMMUNICATION
<br/><br/><label>Dewey Class. No.: </label>621.38152  / CAM