Rai, Chaudhery. <br/><br/>
Mems and moems technology and applications 

 - New Delhi :  Prentice Hall Of India,  1994 
 - 520. 
<br/><br/><label>ISBN: </label>0 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Applied physics
<br/><br/><label>Dewey Class. No.: </label>621.381  / RAI