Campbell , Stephen. <br/><br/>
Science and engineering of microelectronic febrication  

 - 2nd edition. 
 - New Delhi :  Oxford University Press,  1994 
 - 603. 
<br/><br/><label>ISBN: </label>0195681444  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Applied physics
<br/><br/><label>Dewey Class. No.: </label>621.38152  / CAM