Liu, Cheng. <br/><br/>
Fondaton of mems 

 - Delhi :  Pearson Education International,  1994 
 - 530. 
<br/><br/><label>ISBN: </label>013199204X  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Applied physics
<br/><br/><label>Dewey Class. No.: </label>621.381  / LIU