Smith, Donald L. <br/><br/>
Thinfilm deposition : principles and practice 

 - [S.L] :  Macgraw Hill Book Company1976,  1994 
 - 616. 
<br/><br/><label>ISBN: </label>0070585024  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Applied physics
<br/><br/><label>Dewey Class. No.: </label>621.38152  / SMI