Ghandhi,Sorab <br/><br/>
VLSI fabrication principles silicon and gallium arsenide 2/E 

 - Vidhyanagar  Wiley  2010 
<br/><br/><label>ISBN: </label>81-265-1790-9 
<br/><br/><label>Dewey Class. No.: </label>621.381  / GHA