Madou, Marc J. <br/><br/>
Fundamentals of microfabrication and nanotechnology 

 - New York :  Crc Press,  1994 
 - 656. 
<br/><br/><label>ISBN: </label>9781420055191  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering allied operations
<br/><br/><label>Dewey Class. No.: </label>620.5  / MAD