Hsu, T <br/><br/>
Mems & microsystems design and manufacture 

 - New Delhi  :  Mcgraw-Hill Publication,  2002. 
 - xii,436 
<br/><br/><label>ISBN: </label>0-07-120476-8 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electrical Electronics Communication,
<br/><br/><label>Dewey Class. No.: </label>621.381  / HSU