Campbell, S <br/><br/>
The science and engineeing microelectronic fabrication 

 - New Delhi  :  Oxford Uni,  1996. 
 - xv,536 
<br/><br/><label>ISBN: </label>0-19-510508-7 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electrical Electronics Communication,
<br/><br/><label>Dewey Class. No.: </label>621.381 52  / CAM