TY  - BOOK
AU  - Taniguchi, N
TI  - Nanotechnology integrated processing systems for ultra precision and ultra fine products
SN  - 978-0-19-569327-0
U1  - 620.5 
PY  - 2008///
CY  - New Delhi
PB  - Oxford Pub
KW  - Mechanical Mechatronics Engineering
ER  -