TY  - BOOK
AU  - Hak, Mahamed Gad-El
TI  - The mems handbook mems:introduction and fundamentals
SN  - 0-8493-9137-7
U1  - 621.381 
PY  - 2006///
CY  - New Delhi
PB  - Crc Press
KW  - Mechanical Mechatronics Engineering
ER  -