Hak, Mahamed Gad-El <br/><br/>
The mems handbook mems: applications 2nd ed. 

 - New Delhi  :  Crc Press,  2006. 
 - 400 
<br/><br/><label>ISBN: </label>08493-9139-3 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechanical Mechatronics Engineering
<br/><br/><label>Dewey Class. No.: </label>621.381  / HAK