TY  - BOOK
AU  - Ghandhi, S
TI  - Vlsi fabrication principles silicon and gallium arsenide
SN  - 978-81-265-1790-9
U1  - 621.395 
PY  - 2012///
CY  - New Delhi
PB  - Wiley Pub
KW  - Electrical Electronics Communication
ER  -