The mems handbook mems:introduction and fundamentals
Hak, Mahamed Gad-El
The mems handbook mems:introduction and fundamentals - New Delhi : Crc Press, 2006. - 400
0-8493-9137-7
Mechanical Mechatronics Engineering
621.381 / HAK
The mems handbook mems:introduction and fundamentals - New Delhi : Crc Press, 2006. - 400
0-8493-9137-7
Mechanical Mechatronics Engineering
621.381 / HAK