The mems handbook mems:design and fabrication 2nd ed.
Hak, Mahamed Gad-El
The mems handbook mems:design and fabrication 2nd ed. - 2nd edition - New Delhi : Crc Press, 2006. - 400
0-8493-9138-5
Mechanical Mechatronics Engineering
621.381 / HAK
The mems handbook mems:design and fabrication 2nd ed. - 2nd edition - New Delhi : Crc Press, 2006. - 400
0-8493-9138-5
Mechanical Mechatronics Engineering
621.381 / HAK